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arXiv · 0707.0225

Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions

Sanjay K. Ram·MD. N. Islam·P. Roca I Cabarrocas·Satyendra Kumar
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Abstract

Highly crystallized undoped hydrogenated microcrystalline silicon films prepared using SiF4-H2 mixture plasma were investigated at various stages of growth employing different microstructural probes. Our self-consistent results elucidate various aspects of the evolution of film microstructure, compositional changes and variations in crystallite size distributions with film growth. Inclusion of a bimodal crystallite size distribution in microstructural data analysis leads to results that are corroborative with those obtained from other microstructural tools, and yields a more physically accurate and coherent description of microcrystalline silicon film microstructure.

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Sanjay K. Ram, MD. N. Islam, P. Roca I Cabarrocas, Satyendra Kumar. 2007-07-02. Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions. https://arxiv.org/abs/0707.0225

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