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arXiv · 0709.0118

Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors

Gabriel Zeltzer·Jason C. Randel·Amit K. Gupta·Rashid Bashir·Sang-Hun Song·Hari C. Manoharan
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Abstract

Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks additionally display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes indicate >6x sensitivity enhancement over fundamental mode operation.

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Gabriel Zeltzer, Jason C. Randel, Amit K. Gupta, Rashid Bashir, Sang-Hun Song, Hari C. Manoharan. 2007-09-02. Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors. https://doi.org/10.1063/1.2803774

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