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arXiv · 0711.3294

Energy Conversion Using New Thermoelectric Generator

Guillaume Savelli·Marc Plissonnier·Jacqueline Bablet·C. Salvi·J. M. Fournier
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Abstract

During recent years, microelectronics helped to develop complex and varied technologies. It appears that many of these technologies can be applied successfully to realize Seebeck micro generators: photolithography and deposition methods allow to elaborate thin thermoelectric structures at the micro-scale level. Our goal is to scavenge energy by developing a miniature power source for operating electronic components. First Bi and Sb micro-devices on silicon glass substrate have been manufactured with an area of 1cm2 including more than one hundred junctions. Each step of process fabrication has been optimized: photolithography, deposition process, anneals conditions and metallic connections. Different device structures have been realized with different micro-line dimensions. Each devices performance will be reviewed and discussed in function of their design structure.

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Guillaume Savelli, Marc Plissonnier, Jacqueline Bablet, C. Salvi, J. M. Fournier. 2007-11-21. Energy Conversion Using New Thermoelectric Generator. https://arxiv.org/abs/0711.3294

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