Above Ic Micro-Power Generators for RF-Mems

S. Oukassi; R. Salot; S. Bancel; J. -P. Pereira-Ramos

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arXiv · 0711.3296

Above Ic Micro-Power Generators for RF-Mems

S. Oukassi·R. Salot·S. Bancel·J. -P. Pereira-Ramos

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Abstract

This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require similarly miniaturized power sources. Up to day, solid state thin film batteries are realized with mechanical masks. This method doesn't allow dimensions below a few mm^2 active area, and besides the whole process flow is done under controlled atmosphere so as to ensure materials chemical stability (mainly lithiated materials). Within this context, Microelectronics micro-fabrication procedures (photolithography, Reactive Ion Etching...) are used to reach both miniaturisation (100x100 $μ$m^2 targeted unit cell active area) and Above IC technological compatibility. All process steps developed here are realized in clean room environment.

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S. Oukassi, R. Salot, S. Bancel, J. -P. Pereira-Ramos. 2007-11-21. Above Ic Micro-Power Generators for RF-Mems. https://arxiv.org/abs/0711.3296

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