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arXiv · 0711.3329

Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect

Ruey-Fang Shyu·Hsiharng Yang·Wen-Ren Tsai·Jhy-Cherng Tsai
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Abstract

This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between melted photoresist pattern and PTFE can generate micro-ball lens and its array. PTFE thin film was spun onto a silicon wafer and dried in oven. Photoresist AZ4620 was used to pattern micro-columns with different diameters 60, 70 and 80 $μ$m. A thermal reflow process then was applied to melt these micro-column patterns resulted in micro-ball lens array. The achieved micro-ball lens array with diameter 98 $μ$m was fabricated using 80 $μ$m in diameter patterns. This method provides a simple fabrication process and low material cost.

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Ruey-Fang Shyu, Hsiharng Yang, Wen-Ren Tsai, Jhy-Cherng Tsai. 2007-11-21. Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect. https://arxiv.org/abs/0711.3329

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