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arXiv · 0802.2124

Dispersion force for materials relevant for micro and nanodevices fabrication

Andre Gusso·Guilherme J Delben
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Abstract

The dispersion (van der Waals and Casimir) force between two semi-spaces are calculated using the Lifshitz theory for different materials relevant for micro and nanodevices fabrication, namely, gold, silicon, gallium arsenide, diamond and two types of diamond-like carbon (DLC), silicon carbide, silicon nitride and silicon dioxide. The calculations were performed using recent experimental optical data available in the literature, usually ranging from the far infrared up to the extreme ultraviolet bands of the electromagnetic spectrum. The results are presented in the form of a correction factor to the Casimir force predicted between perfect conductors, for the separation between the semi-spaces varying from 1 nanometre up to 1 micrometre. The relative importance of the contributions to the dispersion force of the optical properties in different spectral ranges is analyzed. The role of the temperature for semiconductors and insulators is also addressed. The results are meant to be useful for the estimation of the impact of the Casimir and van der Waals forces on the operational parameters of micro and nanodevices.

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Andre Gusso, Guilherme J Delben. 2008-02-15. Dispersion force for materials relevant for micro and nanodevices fabrication. https://doi.org/10.1088/0022-3727/41/17/175405

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