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arXiv · 0804.1992

Structural, magnetic and mechanical properties of 5 $μ$m thick SmCo films for use in Micro-Electro-Mechanical-Systems

Arnaud Walther·Kirill Khlopkov·Oliver Gutfleisch·Dominique Givord·N. M. Dempsey
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Abstract

5$μ$m thick SmCo films were deposited onto Si substrates using triode sputtering. A study of the influence of deposition temperature (Tdep <= 600 degrees C) on the structural, magnetic and mechanical properties has shown that optimum properties (highest degree of in-plane texture, maximum in-plane coercivity and remanence (1.3 and 0.8 T, respectively), no film peel-off) are achieved for films deposited at the relatively low temperature of 350 degrees C. This temperature is compatible with film integration into Micro-Electro-Mechanical-Systems (MEMS). The deposition rate was increased from 3.6 to 18 $μ$m/h by increasing the surface area of the target from 7 to 81 cm2. Mechanically stable films could be prepared by deposition onto pre-patterned films or deposition through holes in a mask.

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Arnaud Walther, Kirill Khlopkov, Oliver Gutfleisch, Dominique Givord, N. M. Dempsey. 2008-04-12. Structural, magnetic and mechanical properties of 5 $μ$m thick SmCo films for use in Micro-Electro-Mechanical-Systems. https://doi.org/10.1063/1.2840131

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