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arXiv · 0805.0895

RF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress

Alberto Ballestra·Eugenio Brusa·Giorgio De Pasquale·Mircea Gh. Munteanu·Aurelio Somà
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Abstract

In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams bending. Often out-of-plane microcantilevers and clamped-clamped microbeams suffer the presence of residual strain and stress, which affect the value of pull-in voltage. In case of microcantilever an accurate modelling includes the effect of the initial curvature due to microfabrication. In double clamped microbeams a preloading applied by tensile stress is considered. Geometrical onlinearity caused by mechanical coupling between axial and flexural behaviour is detected and modelled. Experimental results demonstrate a good agreement between FEM approaches proposed and tests. A fairly fast and accurate prediction of pull-in condition is performed, thus numerical models can be used to identify residual stress in microbridges by reverse analysis from the measured value of pull-in voltage.

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Alberto Ballestra, Eugenio Brusa, Giorgio De Pasquale, Mircea Gh. Munteanu, Aurelio Somà. 2008-05-07. RF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress. https://arxiv.org/abs/0805.0895

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