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arXiv · 0805.0925

Rejection of Power Supply Noise in Wheatstone Bridges : Application to Piezoresistive MEMS

El Mehdi Boujamaa·Yannick Soulie·Frédérick Mailly·Laurent Latorre·Pascal Nouet
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Abstract

This paper deals with the design of MEMS using piezoresistivity as transduction principle. It is demonstrated that when the sensor topology doesn't allow a perfect matching of strain gauges, the resolution is limited by the ability of the conditioning circuit (typically a Wheatstone bridge) to reject power supply noise. As this ability is strongly reduced when an offset voltage is present at the output of the bridge, the proposed architecture implements a feedback loop to control MOS transistors inserted in the Wheatstone bridge to compensate resistor mismatches. This feedback exhibits a very good offset cancellation and therefore a better resolution is achieved.

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El Mehdi Boujamaa, Yannick Soulie, Frédérick Mailly, Laurent Latorre, Pascal Nouet. 2008-05-07. Rejection of Power Supply Noise in Wheatstone Bridges : Application to Piezoresistive MEMS. https://arxiv.org/abs/0805.0925

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