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arXiv · 0902.1574

Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

Caleb Knoernschild·Changsoon Kim·Felix P. Lu·Jungsang Kim
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Abstract

We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5x5 array with 4 us settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.

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Caleb Knoernschild, Changsoon Kim, Felix P. Lu, Jungsang Kim. 2009-02-10. Multiplexed broadband beam steering system utilizing high speed MEMS mirrors. https://doi.org/10.1364/oe.17.007233

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