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arXiv · 0909.5420

Extraordinary Transmission in the UV Range from Sub-wavelength Slits on Semiconductors

M. A. Vincenti·D. de Ceglia·N. Akozbek·M. Buncick·M. J. Bloemer·M. Scalora
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Abstract

In this paper we describe a way to achieve the extraordinary transmission regime from sub-wavelength slits carved on semiconductor substrates. Unlike metals, the dielectric permittivity of typical semiconductors like GaAs or GaP is negative beginning in the extreme UV range (lambda <= 270nm). We show that the metal-like response of bulk semiconductors exhibits surface plasmon waves that lead to extraordinary transmission in the UV and soft X-ray ranges. The importance of realistic material response versus perfect conductors is also discussed. These findings may be important in high resolution photo-lithography, near field optical devices and ultra high density optical storage.

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M. A. Vincenti, D. de Ceglia, N. Akozbek, M. Buncick, M. J. Bloemer, M. Scalora. 2009-09-29. Extraordinary Transmission in the UV Range from Sub-wavelength Slits on Semiconductors. https://doi.org/10.1063/1.3318460

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