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arXiv · 1001.2974

Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas

Wei Jiang·Hong-yu Wang·Zhen-hua Bi·You-nian Wang
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Abstract

With an implicit Particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show sophisticating relations with the electrode areas. Two-dimensional kinetic effects are also illuminated. Compare to the fluid mode, PIC/MC model is numerical-diffusion-free and thus finer properties of the plasmas are simulated.

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Wei Jiang, Hong-yu Wang, Zhen-hua Bi, You-nian Wang. 2010-01-18. Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas. https://doi.org/10.1088/0963-0252%2F20%2F3%2F035013

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