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arXiv · 1012.1135

Nano-fabricated solid immersion lenses registered to single emitters in diamond

L. Marseglia·J. P. Hadden·A. C. Stanley-Clarke·J. P. Harrison·B. Patton·Y. -L. D. Ho·B. Naydenov·F. Jelezko·J. Meijer·P. R. Dolan·J. M. Smith·J. G. Rarity·J. L. O'Brien
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Abstract

We describe a technique for fabricating micro- and nano-structures incorporating fluorescent defects in diamond with a positional accuracy in the hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam (FIB) etching we first locate a suitable defect with respect to registration marks on the diamond surface and then etch a structure using these coordinates. We demonstrate the technique here by etching an 8 micron diameter hemisphere positioned such that a single negatively charged nitrogen-vacancy defect lies at its origin. This type of structure increases the photon collection efficiency by removing refraction and aberration losses at the diamond-air interface. We make a direct comparison of the fluorescence photon count rate before and after fabrication and observe an 8-fold increase due to the presence of the hemisphere.

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L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y. -L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, J. L. O'Brien. 2011-02-22. Nano-fabricated solid immersion lenses registered to single emitters in diamond. https://doi.org/10.1063/1.3573870

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