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arXiv · 1012.2330

Active microcantilevers based on piezoresistive ferromagnetic thin films

Harish Bhaskaran·Mo Li·Daniel Garcia-Sanchez·Peng Zhao·Ichiro Takeuchi·Hong X Tang
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Abstract

We report the piezoresisitivity in magnetic thin films of FeGa and their use for fabricating self transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive property of FeGa thin films, while the deflection readout is achieved by exploiting the piezoresisitivity of these films. This self-sensing, self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated, cantilever-based sensors.

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Harish Bhaskaran, Mo Li, Daniel Garcia-Sanchez, Peng Zhao, Ichiro Takeuchi, Hong X Tang. 2010-12-10. Active microcantilevers based on piezoresistive ferromagnetic thin films. https://doi.org/10.1063/1.3533390

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