arXiv · 1111.2458
Electret-based cantilever energy harvester: design and optimization
Abstract
We report in this paper the design, the optimization and the fabrication of an electret-based cantilever energy harvester. We develop the mechanical and the electrostatic equations of such a device and its implementation using Finite Elements (FEM) and Matlab in order to get an accurate model. This model is then used in an optimization process. A macroscopic prototype (3.2cm^{2}) was built with a silicon cantilever and a Teflon\textregistered electret. Thanks to this prototype, we manage to harvest 17\muW with ambient-type vibrations of 0.2g on a load of 210M{\Omega}. The experimental results are consistent with simulation results.
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S. Boisseau, G. Despesse, A. Sylvestre. 2011-11-10. Electret-based cantilever energy harvester: design and optimization. https://arxiv.org/abs/1111.2458
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