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arXiv · 1111.4546

Introduction of Zr in nanometric periodic Mg/Co multilayers

K. Le Guen·M. -H. Hu·J. -M. André·Philippe Jonnard·S. -K. Zhou·H. -C. Li·J. -T. Zhu·Z. -S. Wang·N. Mahne·Angela Giglia·S. Nannarone
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Abstract

We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45deg of grazing incidence and reaches 51.3% upon annealing at 200deg C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.

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K. Le Guen, M. -H. Hu, J. -M. André, Philippe Jonnard, S. -K. Zhou, H. -C. Li, J. -T. Zhu, Z. -S. Wang, N. Mahne, Angela Giglia, S. Nannarone. 2011-11-19. Introduction of Zr in nanometric periodic Mg/Co multilayers. https://doi.org/10.1007/s00339-010-6093-2

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