Ordering of block copolymer microstructures in corner geometries

W. T. Lee; N. Delaney; M. Vynnycky; M. A. Morris

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arXiv · 1203.3151

Ordering of block copolymer microstructures in corner geometries

W. T. Lee·N. Delaney·M. Vynnycky·M. A. Morris

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Abstract

The ordering of block copolymers into lamellar microstructures is an attractive route for creating nanopatterns on scales too small to be constructed by current photolithography techniques. This utilises a technique known as graphoepitaxy where topography is used to define the alignment of the pattern for precise placement of pattern features. One problem with this approach is the failure of lamellae to maintain continuity around corners, due to geometrical frustration. We report simulation results using the extended Cahn-Hilliard equation which suggest that this problem could be solved by using rounded corners.

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W. T. Lee, N. Delaney, M. Vynnycky, M. A. Morris. 2012-03-14. Ordering of block copolymer microstructures in corner geometries. https://arxiv.org/abs/1203.3151

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