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arXiv · 1203.5318

Tailoring Nanostructures Using Copolymer Nanoimprint Lithography

Pascal Thebault·Stefan Niedermayer·Stefan Landis·Nicolas Chaix·Patrick Guenoun·Jean Daillant·Xingkun Man·David Andelman·Henri Orland
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Abstract

Finding affordable ways of generating high-density ordered nanostructures that can be transferred to a substrate is a major challenge for industrial applications like memories or optical devices with high resolution features. In this work, we report on a novel technique to direct self-assembled structures of block copolymers by NanoImprint Lithography. Surface energy of a reusable mold and nanorheology are used to organize the copolymers in defect-free structures over tens of micrometers in size. Versatile and controlled in-plane orientations of about 25 nm half-period lamellar nanostructures are achieved and, in particular, include applications to circular tracks of magnetic reading heads.

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Pascal Thebault, Stefan Niedermayer, Stefan Landis, Nicolas Chaix, Patrick Guenoun, Jean Daillant, Xingkun Man, David Andelman, Henri Orland. 2012-03-23. Tailoring Nanostructures Using Copolymer Nanoimprint Lithography. https://doi.org/10.1002/adma.201103532

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