High quality factor single-crystal diamond mechanical resonators

P. Ovartchaiyapong; L. M. A. Pascal; B. A. Myers; P. Lauria; A. C. Bleszynski Jayich

doi:10.1063/1.4760274

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arXiv · 1206.4363

High quality factor single-crystal diamond mechanical resonators

P. Ovartchaiyapong·L. M. A. Pascal·B. A. Myers·P. Lauria·A. C. Bleszynski Jayich

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Abstract

Single-crystal diamond is a promising material for MEMs devices because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has largely been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338,000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications.

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P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, A. C. Bleszynski Jayich. 2012-06-19. High quality factor single-crystal diamond mechanical resonators. https://doi.org/10.1063/1.4760274

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