arXiv · 1206.5908
Electromechanical tuning of vertically-coupled photonic crystal nanobeams
Abstract
We present the design, the fabrication and the characterization of a tunable one-dimensional (1D) photonic crystal cavity (PCC) etched on two vertically-coupled GaAs nanobeams. A novel fabrication method which prevents their adhesion under capillary forces is introduced. We discuss a design to increase the flexibility of the structure and we demonstrate a large reversible and controllable electromechanical wavelength tuning (> 15 nm) of the cavity modes.
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L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. M. van Otten, M. Lermer, S. Höfling, A. Fiore. 2012-06-26. Electromechanical tuning of vertically-coupled photonic crystal nanobeams. https://doi.org/10.1364/oe.20.019255
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