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arXiv · 1211.4072

Femtosecond laser nanostructuring in glass with sub-50nm feature sizes

Yang Liao·Yinglong Shen·Lingling Qiao·Danping Chen·Ya Cheng·Koji Sugioka·Katsumi Midorikawa
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Abstract

We report on controllable production of nanostructures embedded in a porous glass substrate by femtosecond laser direct writing. We show that a hollow nano-void with a lateral size of ~40 nm and an axial size of ~1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables direct construction of 3D nanofluidics inside glass.

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Yang Liao, Yinglong Shen, Lingling Qiao, Danping Chen, Ya Cheng, Koji Sugioka, Katsumi Midorikawa. 2012-11-17. Femtosecond laser nanostructuring in glass with sub-50nm feature sizes. https://doi.org/10.1364/ol.38.000187

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