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arXiv · 1301.4808

Laser scribing on HOPG for graphene stamp printing on silicon wafer

Jelena Butikova·Boris Polyakov·Lauris Dimitrocenko·Edgars Butanovs·Ivars Tale
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Abstract

Highly oriented pyrolytic graphite (HOPG) was scribed by pulsed laser beam to produce square patterns. Patterning of HOPG surface facilitates the detachment of graphene layers during contact printing. Direct HOPG-to-substrate and glue-assisted stamp printing of a few-layers graphene was compared. Printed graphene sheets were visualized by optical and scanning electron microscopy. The number of graphene layers was measured by atomic force microscopy. Glue-assisted stamp printing allows printing relatively large graphene sheets (40x40 microns) onto a silicon wafer, which can be important for microelectronics fabrication. The presented method is easier to implement and is more flexible than the majority of existing ways of placing graphene sheets onto a substrate.

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Jelena Butikova, Boris Polyakov, Lauris Dimitrocenko, Edgars Butanovs, Ivars Tale. 2013-01-21. Laser scribing on HOPG for graphene stamp printing on silicon wafer. https://doi.org/10.2478/s11534-013-0235-z

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