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arXiv · 1301.6248

Monitoring the formation of oxide apertures in micropillar cavities

Morten P. Bakker·Henk Snijders·Donald J. Suntrup III·Tuan-Ahn Truong·Pierre M. Petroff·Martin P. van Exter·Dirk Bouwmeester
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Abstract

An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector (DBR) mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small volume have been formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxide apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step.

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Morten P. Bakker, Henk Snijders, Donald J. Suntrup III, Tuan-Ahn Truong, Pierre M. Petroff, Martin P. van Exter, Dirk Bouwmeester. 2013-01-26. Monitoring the formation of oxide apertures in micropillar cavities. https://doi.org/10.1063/1.4795329

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