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arXiv · 1303.2947

Design of a surface acoustic wave mass sensor in the 100 GHz range

Damiano Nardi·Elisa Zagato·Gabriele Ferrini·Claudio Giannetti·Francesco Banfi
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Abstract

A design for photoacoustic mass sensors operating above 100 GHz is proposed. The design is based on impulsive optical excitation of a pseudosurface acoustic wave in a surface phononic crystal with nanometric periodic grating, and on time-resolved extreme ultraviolet detection of the pseudosurface acoustic wave frequency shift upon mass loading the device. The present design opens the path to sensors operating in a frequency range currently unaccessible to electro-acoustical transducers, providing enhanced sensitivity, miniaturization and incorporating time-resolving capability while forgoing the piezoelectric substrate requirement.

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Damiano Nardi, Elisa Zagato, Gabriele Ferrini, Claudio Giannetti, Francesco Banfi. 2013-03-12. Design of a surface acoustic wave mass sensor in the 100 GHz range. https://doi.org/10.1063/1.4729624

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