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arXiv · 1306.0776

Nanolayer thickness detection via spatial mode projection

N. Hermosa·C. Rosales-Guzmán·S. F. Pereira·J. P. Torres
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Abstract

We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam s spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly-tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one-eightieth (1/80)of the wavelength with a standard error in the picometer scale. Since our scheme enhances the signal-to-noise ratio (SNR), which effectively increases the sensitivity of detection, the extension of this technique to the detection of subnanometric layer thicknesses is feasible.

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N. Hermosa, C. Rosales-Guzmán, S. F. Pereira, J. P. Torres. 2013-10-10. Nanolayer thickness detection via spatial mode projection. https://arxiv.org/abs/1306.0776

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