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arXiv · 1307.5267

Single-exposure profilometry using partitioned aperture wavefront imaging

Roman Barankov·Jerome Mertz
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Abstract

We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a standard lamp-based reflection microscope. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and sub-micron lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.

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Roman Barankov, Jerome Mertz. 2013-07-19. Single-exposure profilometry using partitioned aperture wavefront imaging. https://doi.org/10.1364/ol.38.003961

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