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arXiv · 1312.0312

A novel scheme for simple and precise measurement of the complex refractive index and thickness of thin films

Yu Peng
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Abstract

We demonstrate applications of a novel scheme which is used for measuring refractive index and thickness of thin film by analyzing the relative phase difference and reflected ratio at reflection point of a monolithic folded Fabry-Perot cavity (MFC). The complex refractive index and the thickness are calculated according to the Fresnel formula. Results show that the proposed method has a big improvement in accuracy with simple and clear operating process compared with the conventional Ellipsometry.

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Yu Peng. 2013-12-02. A novel scheme for simple and precise measurement of the complex refractive index and thickness of thin films. https://doi.org/10.1117/12.2067095

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