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arXiv · 1312.0962

A phononic bandgap shield for high-Q membrane microresonators

P. -L. Yu·K. Cicak·N. S. Kampel·Y. Tsaturyan·T. P. Purdy·R. W. Simmonds·C. A. Regal
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Abstract

A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside observed bandgaps the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.

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P. -L. Yu, K. Cicak, N. S. Kampel, Y. Tsaturyan, T. P. Purdy, R. W. Simmonds, C. A. Regal. 2013-12-03. A phononic bandgap shield for high-Q membrane microresonators. https://doi.org/10.1063/1.4862031

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