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arXiv · 1402.2906

TRIAD: a triple patterning lithography aware detailed router

Yen-Hung Lin·Bei Yu·David Z. Pan·Yih-Lang Li
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Abstract

TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41x of runtime.

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Yen-Hung Lin, Bei Yu, David Z. Pan, Yih-Lang Li. 2014-02-12. TRIAD: a triple patterning lithography aware detailed router. https://doi.org/10.1145/2429384.2429408

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