Unusual Cathode Erosion Patterns Observed for Steered Arc Sources

Jonathan Kolbeck; André Anders

doi:10.1109/tps.2014.2328333

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arXiv · 1402.2945

Unusual Cathode Erosion Patterns Observed for Steered Arc Sources

Jonathan Kolbeck·André Anders

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Abstract

A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Here we report about unusual arc spot erosion patterns, which were narrow (~ 2 mm) with periodic pits when operating in argon, and broad (~ 10 mm) with periodic groves and ridges when operating in an argon and oxygen mixtures. These observations can be correlated with the ignition probability for type 2 and type 1 arc spots, respectively.

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Jonathan Kolbeck, André Anders. 2014-02-12. Unusual Cathode Erosion Patterns Observed for Steered Arc Sources. https://doi.org/10.1109/tps.2014.2328333

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