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arXiv · 1402.5683

Adiabatic embedment of nanomechanical resonators in photonic microring cavities

Chi Xiong·Wolfram Pernice·Mo Li·Michael Rooks·Hong X. Tang
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Abstract

We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of the mechanical beam.

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Chi Xiong, Wolfram Pernice, Mo Li, Michael Rooks, Hong X. Tang. 2014-02-23. Adiabatic embedment of nanomechanical resonators in photonic microring cavities. https://doi.org/10.1063/1.3458692

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