arXiv · 1403.3504
Holographic patterning of graphene-oxide films by light-driven reduction
Abstract
We report on the patterning and reduction of graphene-oxide films by holographic lithography. Light reduction can be used to engineer low-cost graphene-based devices by performing a local conversion of insulating oxide into the conductive graphene. In this work, computer generated holograms have been exploited to realize complex graphene patterns in a single shot, differently from serial laser writing or mask-based photolithographic processes. The technique has been further improved by achieving speckle noise reduction: submicron and diffraction-limited features have been obtained. In addition we have also demonstrated that the gray-scale lithography capability can be used to obtain different reduction levels in a single exposure.
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Emanuele Orabona, Antonio Ambrosio, Angela Longo, Gianfranco Carotenuto, Luigi Nicolais, Pasquale Maddalena. 2014-03-14. Holographic patterning of graphene-oxide films by light-driven reduction. https://doi.org/10.1364/ol.39.004263
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