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arXiv · 1403.4067

Subtractive 3D Printing of Optically Active Diamond Structures

Aiden A. Martin·Milos Toth·Igor Aharonovich
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Abstract

Diamond has recently attracted considerable attention as a promising platform for quantum technologies, photonics and high resolution sensing applications. Here we demonstrate a chemical approach that enables the fabrication of functional diamond structures using gas-mediated electron induced etching. The method achieves chemical etching at room temperature through the dissociation of surface-adsorbed H2O molecules by electron irradiation in a water vapor environment. High throughput, parallel processing is possible by electron flood exposure and the use of an etch mask, while single step, mask-free three dimensional fabrication and iterative editing are achieved using a variable pressure scanning electron microscope. The electron induced chemical etching paves the way to a transformative technology for nanofabrication of diamond and other wide band-gap semiconductors.

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BibTeXRIS

Aiden A. Martin, Milos Toth, Igor Aharonovich. 2014-03-17. Subtractive 3D Printing of Optically Active Diamond Structures. https://doi.org/10.1038/srep05022

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