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arXiv · 1410.4350

Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments

S. H. W. Wouters·G. ten Haaf·R. P. M. J. W. Notermans·N. Debernardi·P. H. A. Mutsaers·O. J. Luiten·E. J. D. Vredenbregt
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Abstract

Photo-ionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in Focus Ion Beam (FIB) instruments. Here we show using calculations and Doppler cooling simulations that an atomic rubidium beam with a brightness of $2.1 \times 10^7 A/(m^2\,sr\,eV)$ at a current of 1 nA can be created using a compact 5 cm long 2D magneto-optical compressor which is more than an order of magnitude better than the current state of the art Liquid Metal Ion Source.

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S. H. W. Wouters, G. ten Haaf, R. P. M. J. W. Notermans, N. Debernardi, P. H. A. Mutsaers, O. J. Luiten, E. J. D. Vredenbregt. 2014-10-17. Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments. https://doi.org/10.1103/physreva.90.063817

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