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arXiv · 1510.09147

Buckled Diamond-like Carbon Nanomechanical Resonators

Matti Tomi·Andreas Isacsson·Mika Oksanen·Dmitry Lyashenko·Jukka-Pekka Kaikkonen·Sanna Tervakangas·Jukka Kolehmainen·Pertti Hakonen
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Abstract

We have developed capacitively-transduced nanomechanical resonators using sp$^2$-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of $500{\,\,}^\circ$C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.

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Matti Tomi, Andreas Isacsson, Mika Oksanen, Dmitry Lyashenko, Jukka-Pekka Kaikkonen, Sanna Tervakangas, Jukka Kolehmainen, Pertti Hakonen. 2015-10-30. Buckled Diamond-like Carbon Nanomechanical Resonators. https://doi.org/10.1039/c5nr02820e

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