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arXiv · 1604.08794

RF impedance measurements of DC atmospheric micro-discharges

Lawrence J. Overzet·D. Jung·Monali Mandra·Matthew Goeckner·Thierry Dufour·Remi Dussart·Philippe Lefaucheux
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Abstract

The available diagnostics for atmospheric micro-plasmas remain limited and relatively complex to implement; so we present a radio-frequency technique for diagnosing a key parameter here. The technique allows one to estimate the dependencies of the electron density by measuring the RF-impedance of the micro-plasma and analyzing it with an appropriate equivalent circuit. This technique is inexpensive, can be used in real time and gives reasonable results for argon and helium DC micro-plasmas in holes over a wide pressure range. The electron density increases linearly with current in the expected range consistent with normal glow discharge behavior.

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Lawrence J. Overzet, D. Jung, Monali Mandra, Matthew Goeckner, Thierry Dufour, Remi Dussart, Philippe Lefaucheux. 2016-04-29. RF impedance measurements of DC atmospheric micro-discharges. https://doi.org/10.1140/epjd%2Fe2010-00274-5

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