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arXiv · 1611.07926

Thin Film growth of Solid State materials

A. S Bhattacharyya·P. Prabhakar·R. P. Kumar·S. Sharma·S. K. Raj·R. Ratn·P. Kommu
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Abstract

Magnetron sputtering has also been used to deposit thin films of some materials and it has significant technological importance. A modeling on deposition of epitaxial thin films of Yttrium Stabilized Zirconia (YSZ) was done the diffusion of adatom on the surface were studies. There exists a strong interaction of ions formed in the plasma during the sputtering process. Cu thin films were deposited on Si. Nanocomposite thin film of SiCN showed dendritic growth.

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A. S Bhattacharyya, P. Prabhakar, R. P. Kumar, S. Sharma, S. K. Raj, R. Ratn, P. Kommu. 2016-11-17. Thin Film growth of Solid State materials. https://arxiv.org/abs/1611.07926

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