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arXiv · 1612.02413

Release-free silicon-on-insulator cavity optomechanics

Christopher J. Sarabalis·Yanni D. Dahmani·Rishi N. Patel·Jeff T. Hill·Amir H. Safavi-Naeini
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Abstract

We demonstrate optically coupled nanomechanical resonators fabricated on silicon-on-insulator. Silicon fin waveguides are used to control the dispersion of mechanical waves and engineer localized resonances by modulation of the fin properties. A photonic crystal cavity is designed to localize laser light near the fin and the mechanical motion is read out and modified by radiation pressure back-action. We expect devices and systems made from similar structures to enable co-integration of signal transduction and processing capabilities via electronic, photonic, and phononic degrees freedom in a single scalable platform.

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Christopher J. Sarabalis, Yanni D. Dahmani, Rishi N. Patel, Jeff T. Hill, Amir H. Safavi-Naeini. 2016-12-07. Release-free silicon-on-insulator cavity optomechanics. https://arxiv.org/abs/1612.02413

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