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arXiv · 1809.07215

High quality factor mechanical resonance in a silicon nanowire

D. E. Presnov·S. Kafanov·A. A. Dorofeev·I. V. Bozhev·A. S. Trifonov·Yu. A. Pashkin·V. A. Krupenin
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Abstract

Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of $20\,\mathrm{mK}$ for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the $5\,\mathrm{\mu m}$-long resonator, $3.62\times10^4$, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity $\sim 6 \times 10^{-20}\,\mathrm{g}\,\mathrm{Hz}^{-1/2}$.

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D. E. Presnov, S. Kafanov, A. A. Dorofeev, I. V. Bozhev, A. S. Trifonov, Yu. A. Pashkin, V. A. Krupenin. 2018-09-19. High quality factor mechanical resonance in a silicon nanowire. https://doi.org/10.1134/s0021364018190037

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