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arXiv · 1810.12131

Ultra-thin titanium nitride films for refractory spectral selectivity

Alexander S. Roberts·Manohar Chirumamilla·Deyong Wang·Liqiong An·Kjeld Pedersen·N. Asger Mortensen·Sergey I. Bozhevolnyi
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Abstract

We demonstrate a selectively emitting optical Fabry-Pérot resonator based on a few-nm-thin continuous metallic titanium nitride film, separated by a dielectric spacer from an optically thick titanium nitride back-reflector, which exhibits excellent stability at 1070 K against chemical degradation, thin-film instabilities and melting point depression. The structure paves the way to the design and fabrication of refractory thermal emitters using the well-established processes known from the field of multilayer and rugate optical filters. We demonstrate that a few-nanometer thick films of titanium nitride can be stable under operation at temperatures exceeding 1070 K. This type of selective emitter provides a means towards near-infrared thermal emission that could potentially be tailored to the accuracy level known from rugate optical filters.

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Alexander S. Roberts, Manohar Chirumamilla, Deyong Wang, Liqiong An, Kjeld Pedersen, N. Asger Mortensen, Sergey I. Bozhevolnyi. 2018-10-29. Ultra-thin titanium nitride films for refractory spectral selectivity. https://doi.org/10.1364/ome.8.003717

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