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arXiv · 1811.01049

Compact fully monolithic optomechanical accelerometer

Felipe Guzman·Lee M. Kumanchik·Ruven Spannagel·Claus Braxmaier
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Abstract

We present a highly compact and fully monolithic optomechanical accelerometer fabricated of a single wafer of fused-silica with a total volume of less than 2cc and a total mass of approximately 4 grams. This sensor demonstrates an unprecedented mQ-product of 50kg, highlighting its unique capabilities for reaching high sensitivity in acceleration sensing. The sensor includes a monolithically co-fabricated Fabry-Perot interferometer that uses the accelerometer test mass as a mirror to measure its displacement in orders of 10-12 m/rtHz, reaching acceleration sensitivities to the order of 100 ng/rtHz - 1 ug/rtHz above 1 Hz.

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Felipe Guzman, Lee M. Kumanchik, Ruven Spannagel, Claus Braxmaier. 2018-10-16. Compact fully monolithic optomechanical accelerometer. https://arxiv.org/abs/1811.01049

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