Releasable micro-waveplates

L. Grineviciute; T. Tolenis; M. Ryu; T. Moein; S. -H. Ng; T. Katkus; Jovan Maksimovic; R. Drazdys; J. Morikawa; S. Juodkazis

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arXiv · 1907.05485

Releasable micro-waveplates

L. Grineviciute·T. Tolenis·M. Ryu·T. Moein·S. -H. Ng·T. Katkus·Jovan Maksimovic·R. Drazdys·J. Morikawa·S. Juodkazis

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Abstract

A simple procedure is demonstrated for fabrication of waveplates which can be released from substrate by laser cutting. Oblique angle deposition, chemical etching and laser inscription steps were used for the final lift-off and release of micro-waveplates in HCl solution.

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L. Grineviciute, T. Tolenis, M. Ryu, T. Moein, S. -H. Ng, T. Katkus, Jovan Maksimovic, R. Drazdys, J. Morikawa, S. Juodkazis. 2019-03-31. Releasable micro-waveplates. https://arxiv.org/abs/1907.05485

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