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arXiv · 2001.07992

Dielectric particle lofting from dielectric substrate exposed to low energy electron beam

P. V. Krainov·V. V. Ivanov·D. I. Astakhov·M. A. van de Kerkhof·V. V. Kvon·V. V. Medvedev·A. M. Yakunin
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Abstract

The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article discusses the electron accumulation between such a substrate and a particle lying on it, that can cause a particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration and the explanation of the dust levitation.

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P. V. Krainov, V. V. Ivanov, D. I. Astakhov, M. A. van de Kerkhof, V. V. Kvon, V. V. Medvedev, A. M. Yakunin. 2020-01-22. Dielectric particle lofting from dielectric substrate exposed to low energy electron beam. https://doi.org/10.1088/1361-6595/aba58b

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