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arXiv · 2103.13652

Engineering tunable strain fields in suspended graphene by microelectromechanical systems

Jens Sonntag·Matthias Goldsche·Tymofiy Khodkov·Gerard Verbiest·Sven Reichardt·Nils von den Driesch·Dan Buca·Christoph Stampfer
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Abstract

Here, we present a micro-electromechanical system (MEMS) for the investigation of the electromechanical coupling in graphene and potentially related 2D materials. Key innovations of our technique include: (1) the integration of graphene into silicon-MEMS technology; (2) full control over induced strain fields and doping levels within the graphene membrane and their characterization via spatially resolved confocal Raman spectroscopy; and (3) the ability to detect the mechanical coupling of the graphene sheet to the MEMS device with via their mechanical resonator eigenfrequencies.

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Jens Sonntag, Matthias Goldsche, Tymofiy Khodkov, Gerard Verbiest, Sven Reichardt, Nils von den Driesch, Dan Buca, Christoph Stampfer. 2021-03-25. Engineering tunable strain fields in suspended graphene by microelectromechanical systems. https://doi.org/10.1109/transducers.2019.8808807

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