Charged Oxygen Vacancy Induced Ferroelectric Structure Transition in Hafnium Oxide

Abstract

The discovery of ferroelectric HfO2 in thin films and more recently in bulk is an important breakthrough because of its silicon-compatibility and unexpectedly persistent polarization at low dimensions, but the origin of its ferroelectricity is still under debate. The stabilization of the metastable polar orthorhombic phase was often considered as the cumulative result of various extrinsic factors such as stress, grain boundary, and oxygen vacancies as well as phase transition kinetics during the annealing process. We propose a novel mechanism to stabilize the polar orthorhombic phase over the nonpolar monoclinic phase that is the bulk ground state. Our first-principles calculations demonstrate that the doubly positively charged oxygen vacancy, an overlooked defect but commonly presented in binary oxides, is critical for the stabilization of ferroelectric phase. The charge state of oxygen vacancy serves as a new degree of freedom to control the thermodynamic stability of competing phases of wide-band-gap oxides.