arXiv · 2111.02989
Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond
Abstract
The fabrication of various suspended microstructures made from ultra-nanocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young's modulus as well as the residual stress built in the ultra-nanocrystalline diamond film.
Explore related subjects
Keep this discovery
C. Pachiu, T. Sandu, C. Tibeica, L. M. Veca, R. Popa, M. Popescu, R. Gavrila, C. Popov, V. Avramescu. 2021-11-04. Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond. https://arxiv.org/abs/2111.02989
Cite the original work for its findings. Save a collection to share your selection of sources.