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arXiv · 2201.02669

Resistively loaded coplanar waveguide for microwave measurements of induced carriers

M. L. Freeman·Tzu-Ming Lu·L. W. Engel
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Abstract

We describe the use of a coplanar waveguide whose slots are filled with resistive film, a resistively loaded coplanar waveguide (RLCPW), to measure two dimensional electron systems (2DES). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate, to control the areal charge density of the 2DES. As a demonstration of this technique we present measurements on a Si MOSFET, and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW.

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M. L. Freeman, Tzu-Ming Lu, L. W. Engel. 2022-01-07. Resistively loaded coplanar waveguide for microwave measurements of induced carriers. https://doi.org/10.1063/5.0085112

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