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arXiv · 2204.13592

Relaxation and dynamics of high-stress pre-displaced string resonators

Xiong Yao·David Hoch·Menno Poot
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Abstract

Pre-displaced micromechanical resonators made from high-stress material give rise to new rich static and dynamic behavior. Here, an analytical model is presented to describe the mechanics of such pre-displaced resonators. The bending and tension energies are derived and a modified Euler-Bernoulli equation is obtained by applying the least action principle. By projecting the model onto a cosine shape, the energy landscape is visualized, and the pre-displacement dependence of stress and frequency is studied semi-analytically. The analysis is extended with finite-element simulations, including the mode shape, the role of overhang, and the stress distribution.

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Xiong Yao, David Hoch, Menno Poot. 2022-04-26. Relaxation and dynamics of high-stress pre-displaced string resonators. https://doi.org/10.1103/physrevb.106.174109

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