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arXiv · 2303.09745

Homogeneous pressure decay in multi-chamber vacuum system with finite conductance

Fernando F. Dall'Agnol·Felipe Vieira·Francisco T. Degasperi
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Abstract

We derived the geometrical parameters on the tube connections that homogenize the pressure drop in a multi-chamber vacuum system, where each chamber has a distinct volume and all are connected to the same vacuum pump. We start deriving the pressure drop in a single chamber for a tube with finite conductance. Next, we derive a solution that provides the radius and length for each tube connection between the chambers and the pump that homogenize the pressure drop in all chambers.

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Fernando F. Dall'Agnol, Felipe Vieira, Francisco T. Degasperi. 2023-03-17. Homogeneous pressure decay in multi-chamber vacuum system with finite conductance. https://arxiv.org/abs/2303.09745

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