Impact of plasma potential and plasma sheath composition on the InN PAMOCVD growth kinetics and structural properties

Zaheer Ahmad; Alexander Kozhanov

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arXiv · 2308.11790

Impact of plasma potential and plasma sheath composition on the InN PAMOCVD growth kinetics and structural properties

Zaheer Ahmad·Alexander Kozhanov

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Abstract

In this paper, we present the effect of various growth parameters of PA-MOCVD on the plasma potential. The impact of varying plasma potential on the growth and structural properties of the InN films, and how the growth process and film properties will be affected if an external DC bias perturbs the plasma potential.

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Zaheer Ahmad, Alexander Kozhanov. 2023-08-22. Impact of plasma potential and plasma sheath composition on the InN PAMOCVD growth kinetics and structural properties. https://arxiv.org/abs/2308.11790

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